Authors: NIEMCZYK TM ZHANG LZ HAALAND DM RADIGAN KJ

Citation: Tm. Niemczyk et al., QUANTITATIVE-DETERMINATION OF DIELECTRIC THIN-FILM PROPERTIES ON PRODUCT WAFERS USING INFRARED REFLECTION-ABSORPTION SPECTROSCOPY, Journal of vacuum science & technology. A. Vacuum, surfaces, and films, 16(6), 1998, pp. 3490-3494

Authors: FRANKE JE ZHANG LZ NIEMCZYK TM HAALAND DM RADIGAN KJ

Citation: Je. Franke et al., QUANTITATIVE-ANALYSIS OF BOROPHOSPHOSILICATE GLASS-FILMS ON SILICON USING INFRARED EXTERNAL REFLECTION-ABSORPTION SPECTROSCOPY, Journal of vacuum science & technology. A. Vacuum, surfaces, and films, 13(4), 1995, pp. 1959-1966