Authors:
BRITTEN JA
NGUYEN HT
FALABELLA SF
SHORE BW
PERRY MD
RAGUIN DH
Citation: Ja. Britten et al., ETCH-STOP CHARACTERISTICS OF SC2O3 AND HFO2 FILMS FOR MULTILAYER DIELECTRIC GRATING APPLICATIONS, Journal of vacuum science & technology. A. Vacuum, surfaces, and films, 14(5), 1996, pp. 2973-2975