Authors: SWIATEK Z BONARSKI JT CIACH R KUZNICKI ZT FODCHUK IM RARANSKY MD GORLEY P

Citation: Z. Swiatek et al., INVESTIGATION OF INHOMOGENEOUS STRUCTURES OF NEAR-SURFACE-LAYERS IN ION-IMPLANTED SILICON, Thin solid films, 319(1-2), 1998, pp. 39-43