Authors:
CHEN AT
KAVIANI K
REMPEL AW
KALLURI S
STEIER WH
SHI YQ
LIANG ZY
DALTON LR
Citation: At. Chen et al., OPTIMIZED OXYGEN PLASMA-ETCHING OF POLYURETHANE-BASED ELECTROOPTIC POLYMER FOR LOW-LOSS OPTICAL WAVE-GUIDE FABRICATION, Journal of the Electrochemical Society, 143(11), 1996, pp. 3648-3651