Authors: MCKEAN DR RUSSELL TP HINSBERG WD HOFER D RENALDO AF WILLSON CG

Citation: Dr. Mckean et al., THICK-FILM POSITIVE PHOTORESIST - DEVELOPMENT AND RESOLUTION ENHANCEMENT TECHNIQUE, Journal of vacuum science & technology. B, Microelectronics and nanometer structures processing, measurement and phenomena, 13(6), 1995, pp. 3000-3006