Authors: MCDANIEL FD DATAR SA GUO BN RENFROW SN ZHAO ZY ANTHONY JM

Citation: Fd. Mcdaniel et al., LOW-LEVEL COPPER CONCENTRATION MEASUREMENTS IN SILICON-WAFERS USING TRACE-ELEMENT ACCELERATOR MASS-SPECTROMETRY, Applied physics letters, 72(23), 1998, pp. 3008-3010

Authors: DATAR SA RENFROW SN GUO BN ANTHONY JM ZHAO ZY MCDANIEL FD

Citation: Sa. Datar et al., TEAMS DEPTH PROFILES IN SEMICONDUCTORS, Nuclear instruments & methods in physics research. Section B, Beam interactions with materials and atoms, 123(1-4), 1997, pp. 571-574

Authors: MCDANIEL FD ANTHONY JM RENFROW SN KIM YD DATAR SA MATTESON S

Citation: Fd. Mcdaniel et al., DEPTH PROFILING ANALYSIS OF SEMICONDUCTOR-MATERIALS BY ACCELERATOR MASS-SPECTROMETRY, Nuclear instruments & methods in physics research. Section B, Beam interactions with materials and atoms, 99(1-4), 1995, pp. 537-540

Authors: ANTHONY JM KIRCHHOFF JF MARBLE DK RENFROW SN KIM YD MATTESON S MCDANIEL FD

Citation: Jm. Anthony et al., ACCELERATOR BASED SECONDARY-ION MASS-SPECTROMETRY FOR IMPURITY ANALYSIS, Journal of vacuum science & technology. A. Vacuum, surfaces, and films, 12(4), 1994, pp. 1547-1550

Authors: MCDANIEL FD ANTHONY JM KIRCHHOFF JF MARBLE DK KIM YD RENFROW SN GRANNAN EC REZNIK ER VIZKELETHY G MATTESON S

Citation: Fd. Mcdaniel et al., IMPURITY DETERMINATION IN ELECTRONIC MATERIALS BY ACCELERATOR MASS-SPECTROMETRY, Nuclear instruments & methods in physics research. Section B, Beam interactions with materials and atoms, 89(1-4), 1994, pp. 242-249