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DENSITY OF AS-DEPOSITED AND ANNEALED THIN SILICON-NITRIDE FILMS
Authors:
BRUYERE JC SAVALL C REYNES B BRUNEL M ORTEGA L
Citation:
Jc. Bruyere et al., DENSITY OF AS-DEPOSITED AND ANNEALED THIN SILICON-NITRIDE FILMS, Journal of physics. D, Applied physics, 26(4), 1993, pp. 713-716
Risultati:
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