Authors:
CHUI BW
STOWE TD
JU YS
GOODSON KE
KENNY TW
MAMIN HJ
TERRIS BD
RIED RP
RUGAR D
Citation: Bw. Chui et al., LOW-STIFFNESS SILICON CANTILEVERS WITH INTEGRATED HEATERS AND PIEZORESISTIVE SENSORS FOR HIGH-DENSITY AFM THERMOMECHANICAL DATA-STORAGE, Journal of microelectromechanical systems, 7(1), 1998, pp. 69-78
Citation: Rp. Ried et al., 6-MHZ 2-N M PIEZORESISTIVE ATOMIC-FORCE-MICROSCOPE CANTILEVERS WITH INCISIVE TIPS/, Journal of microelectromechanical systems, 6(4), 1997, pp. 294-302