Authors: ROADMAN SE MAITY N CARTER JN ENGSTROM JR

Citation: Se. Roadman et al., STUDY OF THIN-FILM DEPOSITION PROCESSES EMPLOYING VARIABLE KINETIC-ENERGY, HIGHLY COLLIMATED NEUTRAL MOLECULAR-BEAMS, Journal of vacuum science & technology. A. Vacuum, surfaces, and films, 16(6), 1998, pp. 3423-3433

Authors: CHEN G BOYD ID ROADMAN SE ENGSTROM JR

Citation: G. Chen et al., MONTE-CARLO ANALYSIS OF A HYPERTHERMAL SILICON DEPOSITION PROCESS, Journal of vacuum science & technology. A. Vacuum, surfaces, and films, 16(2), 1998, pp. 689-699

Authors: JONES ME ROADMAN SE LAM AM ERES G ENGSTROM JR

Citation: Me. Jones et al., SUPERSONIC MOLECULAR-BEAM STUDIES OF THE DISSOCIATIVE CHEMISORPTION OF GEH4 AND GE2H6 ON THE GE(100) AND GE(111) SURFACES, The Journal of chemical physics, 105(16), 1996, pp. 7140-7151

Authors: MAITY N XIA LQ ROADMAN SE ENGSTROM JR

Citation: N. Maity et al., A SUPERSONIC MOLECULAR-BEAM STUDY OF THE CHEMISORPTION OF PH3 ON THE SI(100) SURFACE, Surface science, 344(3), 1995, pp. 203-220

Authors: MAITY N XIA LQ ROADMAN SE ENGSTROM JR

Citation: N. Maity et al., THE ADSORPTION OF PH3 ON THE SI(111)-(7X7) SURFACE - AN EXAMPLE OF AUTOCATALYTIC DISSOCIATIVE CHEMISORPTION, Surface science, 344(3), 1995, pp. 1201-1206