Authors: RUDENT P NAVRATIL P GIANI A BOYER A

Citation: P. Rudent et al., DESIGN OF A NEW SENSOR FOR MASS-FLOW CONTROLLER USING THIN-FILM TECHNOLOGY-BASED ON AN ANALYTICAL THERMAL-MODEL, Journal of vacuum science & technology. A. Vacuum, surfaces, and films, 16(6), 1998, pp. 3559-3563