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DESIGN OF A NEW SENSOR FOR MASS-FLOW CONTROLLER USING THIN-FILM TECHNOLOGY-BASED ON AN ANALYTICAL THERMAL-MODEL
Authors:
RUDENT P NAVRATIL P GIANI A BOYER A
Citation:
P. Rudent et al., DESIGN OF A NEW SENSOR FOR MASS-FLOW CONTROLLER USING THIN-FILM TECHNOLOGY-BASED ON AN ANALYTICAL THERMAL-MODEL, Journal of vacuum science & technology. A. Vacuum, surfaces, and films, 16(6), 1998, pp. 3559-3563
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