Authors:
AKKERMAN ZL
KOSINOVA ML
FAINER NI
RUMJANTSEV YM
SYSOEVA NP
Citation: Zl. Akkerman et al., CHEMICAL-STABILITY OF HYDROGEN-CONTAINING BORON-NITRIDE FILMS OBTAINED BY PLASMA-ENHANCED CHEMICAL-VAPOR-DEPOSITION, Thin solid films, 260(2), 1995, pp. 156-160