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Impact of ex-situ and in-situ cleans on the performance of bipolar transistors with low thermal budget in-situ phosphorus-doped polysilicon emitter contacts
Authors: Rahim, AIA Marsh, CD Ashburn, P Booker, GR
Citation: Aia. Rahim et al., Impact of ex-situ and in-situ cleans on the performance of bipolar transistors with low thermal budget in-situ phosphorus-doped polysilicon emitter contacts, IEEE DEVICE, 48(11), 2001, pp. 2506-2513
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