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Aqueous cleaning of sidewall redepositions formed by reactive ion etching of platinum
Authors:
Ranpura, HM Butler, DH Chang, LH Tracy, CJ Beaudoin, SP
Citation:
Hm. Ranpura et al., Aqueous cleaning of sidewall redepositions formed by reactive ion etching of platinum, J ELCHEM SO, 146(8), 1999, pp. 3114-3118
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