Authors: Basile, G Becker, P Bergamin, A Cavagnero, G Franks, A Jackson, K Kuetgens, U Mana, G Palmer, EW Robbie, CJ Stedman, M Stumpel, J Yacoot, A Zosi, G

Citation: G. Basile et al., Combined optical and X-ray interferometry for high-precision dimensional metrology, P ROY SOC A, 456(1995), 2000, pp. 701-729