Citation: A. Raveh et al., Graded TiAlN layers deposited by electron cyclotron resonance-assisted reactive sputtering, J VAC SCI A, 17(4), 1999, pp. 2001-2006
Authors:
Raveh, A
Weiss, M
Pinkas, M
Rosen, DZ
Kimmel, G
Citation: A. Raveh et al., Graded Al-AlN, TiN, and TiAlN multilayers deposited by radio-frequency reactive magnetron sputtering, SURF COAT, 114(2-3), 1999, pp. 269-277