Authors: Nottola, A Gerardino, A Gentili, M Di Fabrizio, E Cabrini, S Melpignano, P Rotaris, G

Citation: A. Nottola et al., Fabrication of semi-continuous profile diffractive optical elements for beam shaping by electron beam lithography, MICROEL ENG, 53(1-4), 2000, pp. 325-328