Authors: Sundermann, M Hartwich, J Rott, K Meyners, D Majkova, E Kleineberg, U Grunze, M Heinzmann, U

Citation: M. Sundermann et al., Nanopatterning of Au absorber films on Mo/Si EUV multilayer mirrors by STMlithography in self-assembled monolayers, SURF SCI, 454, 2000, pp. 1104-1109