Login
|
New Account
AAAAAA
ITA
ENG
Results:
1-1
|
Results: 1
Low-temperature growth of SiCAlN films of high hardness on Si(111) substrates
Authors:
Roucka, R Tolle, J Smith, DJ Crozier, P Tsong, IST Kouvetakis, J
Citation:
R. Roucka et al., Low-temperature growth of SiCAlN films of high hardness on Si(111) substrates, APPL PHYS L, 79(18), 2001, pp. 2880-2882
Risultati:
1-1
|