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Authors: DANEK M LIAO M TSENG J LITTAU K SAIGAL D ZHANG H MOSELY R EIZENBERG M

Citation: M. Danek et al., RESISTIVITY REDUCTION AND CHEMICAL STABILIZATION CT ORGANOMETALLIC CHEMICAL-VAPOR-DEPOSITED TITANIUM NITRIDE BY NITROGEN RF PLASMA, Applied physics letters, 68(7), 1996, pp. 1015-1016