Authors: GOPINATH V SALBERT GT GROTJOHN TA REINHARD DK

Citation: V. Gopinath et al., ELECTRON-CYCLOTRON-RESONANCE SPUTTER REMOVAL OF SIO2 ON SILICON-WAFERS, Journal of vacuum science & technology. B, Microelectronics and nanometer structures processing, measurement and phenomena, 11(6), 1993, pp. 2067-2070