Authors:
HASHIMOTO K
SAMUELS DJ
FARRELL TR
MOY D
MARTINO RM
FERGUSON RA
SATO T
MAURER W
Citation: K. Hashimoto et al., THE APPLICATION OF DEEP UV PHASE SHIFTED-SINGLE LAYER HALF-TONE RETICLES TO 256 MBIT DYNAMIC RANDOM-ACCESS MEMORY CELL PATTERNS, JPN J A P 1, 33(12B), 1994, pp. 6823-6830