Citation: Yj. Lee et al., TEMPERATURE-MEASUREMENT IN RAPID THERMAL-PROCESSING USING THE ACOUSTIC TEMPERATURE SENSOR, IEEE transactions on semiconductor manufacturing, 9(1), 1996, pp. 115-121
Authors:
JURICHICH S
KING TJ
SARASWAT K
MEHLHAFF J
Citation: S. Jurichich et al., LOW THERMAL BUDGET POLYCRYSTALLINE SILICON-GERMANIUM THIN-FILM TRANSISTORS FABRICATED BY RAPID THERMAL ANNEALING, JPN J A P 2, 33(8B), 1994, pp. 120001139-120001141
Citation: C. Schaper et al., CONTROL OF MMST RTP - REPEATABILITY, UNIFORMITY, AND INTEGRATION FOR FLEXIBLE MANUFACTURING, IEEE transactions on semiconductor manufacturing, 7(2), 1994, pp. 202-219