Authors: SCARLETE M BUTLER IS HARROD JF

Citation: M. Scarlete et al., NITROGENATION OF SILICON-CARBIDE LAYERS DEPOSITED ON SILICON SINGLE-CRYSTAL WAFERS VIA PYROLYSIS OF POLY(METHYLSILANE), Chemistry of materials, 7(6), 1995, pp. 1214-1220

Authors: HE JL SCARLETE M HARROD JF

Citation: Jl. He et al., SILICON-NITRIDE AND SILICON CARBONITRIDE BY THE PYROLYSIS OF POLY(METHYLSILADIAZANE), Journal of the American Ceramic Society, 78(11), 1995, pp. 3009-3017

Authors: SCARLETE M BRIENNE S BUTLER IS HARROD JF

Citation: M. Scarlete et al., INFRARED SPECTROSCOPIC STUDY OF THIN-FILMS OF POLY(METHYLSILANE), ITSOXIDATION, AND ITS TRANSFORMATION INTO POLY(CARBOSILANE) ON THE SURFACES OF SILICON SINGLE-CRYSTAL WAFERS, Chemistry of materials, 6(7), 1994, pp. 977-982