Authors: OECHSNER H SCHAFFT M SCHUMACHER A WOLFF D

Citation: H. Oechsner et al., LOW-ENERGY IBAD - CORRELATION BETWEEN PROCESS PARAMETERS AND FILM PROPERTIES FOR ION-BEAM-ASSISTED EVAPORATION AND SPUTTER-DEPOSITION, Materialwissenschaft und Werkstofftechnik, 29(9), 1998, pp. 466-475