Authors: SCHRODEROEYNHAUSEN F BURKHARDT B FLADUNG T KOTTER F SCHNIEDERS A WIEDMANN L BENNINGHOVEN A

Citation: F. Schroderoeynhausen et al., QUANTIFICATION OF METAL CONTAMINANTS ON GAAS WITH TIME-OF-FLIGHT SECONDARY-ION MASS-SPECTROMETRY, Journal of vacuum science & technology. B, Microelectronics and nanometer structures processing, measurement and phenomena, 16(3), 1998, pp. 1002-1006