Authors: SLAUGHTER JM SCHULZE DW HILLS CR MIRONE A STALIO R WATTS RN TARRIO C LUCATORTO TB KRUMREY M MUELLER P FALCO CM

Citation: Jm. Slaughter et al., STRUCTURE AND PERFORMANCE OF SI MO MULTILAYER MIRRORS FOR THE EXTREME-ULTRAVIOLET/, Journal of applied physics, 76(4), 1994, pp. 2144-2156