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Results:
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Results: 2
ENERGY-MASS SPECTROMETRY AND AUTOMATIC LANGMUIR PROBE MEASUREMENTS INREACTIVE ICP PLASMAS FOR DIAMOND DEPOSITION
Authors:
AWAKOWICZ P SCHWEFEL R WERDER M KASPER W
Citation:
P. Awakowicz et al., ENERGY-MASS SPECTROMETRY AND AUTOMATIC LANGMUIR PROBE MEASUREMENTS INREACTIVE ICP PLASMAS FOR DIAMOND DEPOSITION, Surface & coatings technology, 98(1-3), 1998, pp. 1020-1026
DIAMOND DEPOSITION AND PLASMA DIAGNOSTICS IN A 27 MHZ INDUCTIVE COUPLED REACTOR (ICP)
Authors:
AWAKOWICZ P SCHWEFEL R WERDER M KASPER W
Citation:
P. Awakowicz et al., DIAMOND DEPOSITION AND PLASMA DIAGNOSTICS IN A 27 MHZ INDUCTIVE COUPLED REACTOR (ICP), DIAMOND AND RELATED MATERIALS, 6(12), 1997, pp. 1816-1823
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