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Results: 1
APPLICATION OF NEAR-FIELD OPTICS TO CRITICAL DIMENSION METROLOGY
Authors:
BUKOFSKY SJ SELBERG SA GROBER RD TRAUTMAN JK
Citation:
Sj. Bukofsky et al., APPLICATION OF NEAR-FIELD OPTICS TO CRITICAL DIMENSION METROLOGY, Applied physics letters, 70(18), 1997, pp. 2368-2370
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