Authors: SAITOH K OHSAWA H SENTOKU K MATSUMOTO T MIZUSAWA N FUKUDA Y UDA K SUMITANI H HIFUMI T

Citation: K. Saitoh et al., OVERLAY ACCURACY OF CANON SYNCHROTRON-RADIATION STEPPER XFPA FOR 0.15-MU-M PROCESS, Journal of vacuum science & technology. B, Microelectronics and nanometer structures processing, measurement and phenomena, 14(6), 1996, pp. 4303-4307