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Citation: C. Shafai et al., ETCH-INDUCED STRESS FAILURES OF SIO2 CANTILEVER BEAMS, Sensors and actuators. A, Physical, 70(3), 1998, pp. 283-290

Authors: SHAFAI C BRETT MJ

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Authors: SHAFAI C BRETT MJ

Citation: C. Shafai et Mj. Brett, A MICRO-INTEGRATED PELTIER HEAT-PUMP FOR LOCALIZED ON-CHIP TEMPERATURE CONTROL, Canadian journal of physics, 74, 1996, pp. 139-142

Authors: SHAFAI C THOMSON DJ SIMARDNORMANDIN M

Citation: C. Shafai et al., 2-DIMENSIONAL DELINEATION OF SEMICONDUCTOR DOPING BY SCANNING RESISTANCE MICROSCOPY, Journal of vacuum science & technology. B, Microelectronics and nanometer structures processing, measurement and phenomena, 12(1), 1994, pp. 378-382

Authors: SHAFAI C THOMSON DJ SIMARDNORMANDIN M MATTIUSSI G SCANLON PJ

Citation: C. Shafai et al., DELINEATION OF SEMICONDUCTOR DOPING BY SCANNING RESISTANCE MICROSCOPY, Applied physics letters, 64(3), 1994, pp. 342-344