Authors:
TEDDER LL
RUBLOFF GW
SHAREEF I
ANDERLE M
KIM DH
PARSONS GN
Citation: Ll. Tedder et al., REAL-TIME PROCESS AND PRODUCT DIAGNOSTICS IN RAPID THERMAL CHEMICAL-VAPOR-DEPOSITION USING IN-SITU MASS-SPECTROMETRIC SAMPLING, Journal of vacuum science & technology. B, Microelectronics and nanometer structures processing, measurement and phenomena, 13(4), 1995, pp. 1924-1927