Authors: BAILEY M BRUCH R SHEVELKO A VASILYEV A

Citation: M. Bailey et al., CHARACTERISTICS OF A MULTILAYER MIRROR POLARIMETER FOR MEASUREMENTS AT EXTREME-ULTRAVIOLET WAVELENGTHS, Review of scientific instruments, 68(1), 1997, pp. 1051-1054

Authors: SHMAENOK L BIJKERK F LOUIS E VANHONK A VANDERWIEL MJ PLATONOV Y SHEVELKO A MITROFANOV A FROWEIN H NICOLAUS B VOSS F DESOR R

Citation: L. Shmaenok et al., ISSUES OF LASER-PLASMA SOURCES FOR SOFT-X-RAY PROJECTION LITHOGRAPHY, Microelectronic engineering, 23(1-4), 1994, pp. 211-214