Citation: H. Kitajima et Y. Shiramizu, REQUIREMENTS FOR CONTAMINATION CONTROL IN THE GIGABIT ERA, IEEE transactions on semiconductor manufacturing, 10(2), 1997, pp. 267-272
Authors:
SHIRAMIZU Y
WATANABE K
TANAKA M
AOKI H
KITAJIMA H
Citation: Y. Shiramizu et al., REMOVAL OF METAL AND ORGANIC CONTAMINANTS FROM SILICON SUBSTRATES USING ELECTROLYSIS-IONIZED WATER CONTAINING AMMONIUM-CHLORIDE, Journal of the Electrochemical Society, 143(5), 1996, pp. 1632-1635