Authors: KITAJIMA H SHIRAMIZU Y

Citation: H. Kitajima et Y. Shiramizu, REQUIREMENTS FOR CONTAMINATION CONTROL IN THE GIGABIT ERA, IEEE transactions on semiconductor manufacturing, 10(2), 1997, pp. 267-272

Authors: SHIRAMIZU Y WATANABE K TANAKA M AOKI H KITAJIMA H

Citation: Y. Shiramizu et al., REMOVAL OF METAL AND ORGANIC CONTAMINANTS FROM SILICON SUBSTRATES USING ELECTROLYSIS-IONIZED WATER CONTAINING AMMONIUM-CHLORIDE, Journal of the Electrochemical Society, 143(5), 1996, pp. 1632-1635

Authors: SHIRAMIZU Y MORITA M ISHITANI A

Citation: Y. Shiramizu et al., COPPER ADSORPTION BEHAVIOR ON SILICON SUBSTRATES, IEICE transactions on electronics, E76C(4), 1993, pp. 635-640