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Citation: Ja. Lebens et al., UNINTENTIONAL DOPING OF WAFERS DUE TO ORGANOPHOSPHATES IN THE CLEAN ROOM AMBIENT, Journal of the Electrochemical Society, 143(9), 1996, pp. 2906-2909

Authors: MALIK IJ PIROOZ S SHIVE LW DAVENPORT AJ VITUS CM

Citation: Ij. Malik et al., SURFACE-ROUGHNESS OF SILICON-WAFERS ON DIFFERENT LATERAL LENGTH SCALES, Journal of the Electrochemical Society, 140(5), 1993, pp. 75-77