Authors:
SHOGUN V
TYABLIKOV A
SCHREITER S
SCHARFF W
WALLENDORF T
MARKE S
Citation: V. Shogun et al., EMISSION ACTINOMETRIC INVESTIGATIONS OF ATOMIC-HYDROGEN AND CH RADICALS IN PLASMA-ENHANCED CHEMICAL-VAPOR-DEPOSITION PROCESSES OF HEXAMETHYLDISILOXANE, Surface & coatings technology, 98(1-3), 1998, pp. 1382-1386
Authors:
SHOGUN V
TYABLIKOV A
ABACHEV M
PASHKOV V
SCHARFF W
WALLENDORF T
Citation: V. Shogun et al., AN EMISSION ACTINOMETRIC METHOD FOR MEASURING OF PLASMACHEMICAL REACTION KINETIC-PARAMETERS WITH DISCHARGE POWER MODULATION BY A SERIES OF SHORT PROBING PULSES, Surface & coatings technology, 98(1-3), 1998, pp. 1406-1410
Authors:
SHOGUN V
TYABLIKOV A
SHELYHMANOV E
ABACHEV M
SCHARFF W
WALLENDORF T
Citation: V. Shogun et al., APPLICATION OF AN ACOUSTOOPTIC SPECTROMETER FOR PLASMA-ETCHING PROCESS QUALITY-CONTROL, Surface & coatings technology, 74-5(1-3), 1995, pp. 571-574