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A STUDY OF STRAIN IN THIN EPITAXIAL-FILMS OF YTTRIUM SILICIDE ON SI(111)
Authors:
SIEGAL MF MARTINEZMIRANDA LJ SANTIAGOAVILES JJ GRAHAM WR SIEGAL MP
Citation:
Mf. Siegal et al., A STUDY OF STRAIN IN THIN EPITAXIAL-FILMS OF YTTRIUM SILICIDE ON SI(111), Journal of applied physics, 75(3), 1994, pp. 1517-1520
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