Authors: VARTULI CB PEARTON SJ LEE JW POLYAKOV AY SHIN M GREVE DW SKRONOWSKI M SHUL RJ

Citation: Cb. Vartuli et al., ELECTRON-CYCLOTRON-RESONANCE PLASMA-ETCHING OF ALGAN IN CL-2 AR AND BCL3/AR PLASMAS/, Journal of the Electrochemical Society, 144(6), 1997, pp. 2146-2149