Authors: MORIYA N BRENER I KALISH R PFEIFFER W DEICHER M KELLER R MAGERLE R RECKNAGEL E SKUDLIK H WICHERT T WOLF H

Citation: N. Moriya et al., ANNEALING OF CD-IMPLANTED GAAS - DEFECT REMOVAL, LATTICE SITE OCCUPATION, AND ELECTRICAL ACTIVATION, Journal of applied physics, 73(9), 1993, pp. 4248-4256