Authors:
OESTERSCHULZE E
SCHOLZ W
MIHALCEA C
ALBERT D
SOBISCH B
KULISCH W
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Citation: R. Beckmann et al., INVESTIGATION OF THE BIAS NUCLEATION PROCESS IN MICROWAVE PLASMA-ENHANCED CHEMICAL-VAPOR-DEPOSITION OF DIAMOND, DIAMOND AND RELATED MATERIALS, 3(4-6), 1994, pp. 555-559