Citation: Gi. Kuznetsov et Ea. Sokolovsky, DEPENDENCE OF EFFECTIVE WORK FUNCTION FOR LAB6 ON SURFACE CONDITIONS, Physica scripta. T, T71, 1997, pp. 130-133
Authors:
GUHARAY SK
SOKOLOVSKY EA
REISER M
ORLOFF J
MELNGAILIS J
Citation: Sk. Guharay et al., STUDY OF ENERGY BROADENING OF HIGH-BRIGHTNESS ION-BEAMS FROM A SURFACE PLASMA PENNING SOURCE AND ITS RELEVANCE IN ION PROJECTION LITHOGRAPHY, Microelectronic engineering, 35(1-4), 1997, pp. 435-438
Authors:
DUDNIKOV VG
DEREVYANKIN GE
KOVALEVSKY DV
SAVKIN VY
SOKOLOVSKY EA
GUHARAY SK
Citation: Vg. Dudnikov et al., SURFACE PLASMA SOURCE TO GENERATE HIGH-BRIGHTNESS H- BEAMS FOR ION PROJECTION LITHOGRAPHY, Review of scientific instruments, 67(4), 1996, pp. 1614-1617
Authors:
DUDNIKOV VG
DEREVYANKIN GE
KOVALEVSKY DV
SAVKIN VY
SOKOLOVSKY EA
GUHARAY SK
Citation: Vg. Dudnikov et al., SURFACE PLASMA SOURCE TO GENERATE HIGH-BRIGHTNESS H- BEAMS FOR ION PROJECTION LITHOGRAPHY, Review of scientific instruments, 67(3), 1996, pp. 927-927