Authors: KUZNETSOV GI SOKOLOVSKY EA

Citation: Gi. Kuznetsov et Ea. Sokolovsky, DEPENDENCE OF EFFECTIVE WORK FUNCTION FOR LAB6 ON SURFACE CONDITIONS, Physica scripta. T, T71, 1997, pp. 130-133

Authors: GUHARAY SK SOKOLOVSKY EA REISER M ORLOFF J MELNGAILIS J

Citation: Sk. Guharay et al., STUDY OF ENERGY BROADENING OF HIGH-BRIGHTNESS ION-BEAMS FROM A SURFACE PLASMA PENNING SOURCE AND ITS RELEVANCE IN ION PROJECTION LITHOGRAPHY, Microelectronic engineering, 35(1-4), 1997, pp. 435-438

Authors: DUDNIKOV VG DEREVYANKIN GE KOVALEVSKY DV SAVKIN VY SOKOLOVSKY EA GUHARAY SK

Citation: Vg. Dudnikov et al., SURFACE PLASMA SOURCE TO GENERATE HIGH-BRIGHTNESS H- BEAMS FOR ION PROJECTION LITHOGRAPHY, Review of scientific instruments, 67(4), 1996, pp. 1614-1617

Authors: DUDNIKOV VG DEREVYANKIN GE KOVALEVSKY DV SAVKIN VY SOKOLOVSKY EA GUHARAY SK

Citation: Vg. Dudnikov et al., SURFACE PLASMA SOURCE TO GENERATE HIGH-BRIGHTNESS H- BEAMS FOR ION PROJECTION LITHOGRAPHY, Review of scientific instruments, 67(3), 1996, pp. 927-927