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Authors: SORITA T SATAKE T ADACHI H OGATA T KOBAYASHI K

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Authors: SORITA T SHIGA S IKUTA K EGASHIRA Y KOMIYAMA H

Citation: T. Sorita et al., THE FORMATION MECHANISM AND STEP COVERAGE QUALITY OF TETRAETHYLORTHOSILICATE-SIO2 FILMS STUDIED BY THE MICRO MACROCAVITY METHOD, Journal of the Electrochemical Society, 140(10), 1993, pp. 2952-2959