Citation: V. Rigato et al., CORRELATION OF BORON AND NITROGEN CONTENTS WITH THE FLUX OF ENERGETICAR+ IONS AT THE SUBSTRATE DURING THE DEPOSITION OF BN COATINGS BY RF MAGNETRON SPUTTERING, Surface & coatings technology, 97(1-3), 1997, pp. 275-280
Authors:
RIGATO V
SPOLAORE M
GIORGIS F
DEPERO LE
SANGALETTI L
COLOMBO P
Citation: V. Rigato et al., MICROSTRUCTURE AND PHYSICAL-PROPERTIES OF BXNY(OZHK) COATINGS DEPOSITED BY RF UNBALANCED MAGNETRON SPUTTERING, Surface & coatings technology, 97(1-3), 1997, pp. 582-589