Authors: MINKIEWICZ VJ STASIAK J WHITE RL CORNELL RW MOORE JO EATON R ELDRIDGE JM LEE FC

Citation: Vj. Minkiewicz et al., SOME MECHANICAL AND THERMAL-PROPERTIES OF PECVD A-SIXC1-X-H AND A-SIXN1-X-H FILMS PREPARED BY MIXED FREQUENCY PLASMA PROCESSES, Surface & coatings technology, 68, 1994, pp. 229-233