Authors:
OELKRUG D
HAIBER J
LEGE R
STAUCH H
EGELHAAF HJ
Citation: D. Oelkrug et al., TEMPORAL STABILITY OF VAPOR-DEPOSITED MOLECULAR FILMS AS STUDIED BY LASER-LIGHT SCATTERING, Thin solid films, 285, 1996, pp. 581-584
Citation: H. Stauch et al., IMPACT OF CHUCK FLATNESS ON WAFER DISTORTION AND STEPPER OVERLAY - COMPARISON OF EXPERIMENTAL AND FEM-RESULTS, Microelectronic engineering, 23(1-4), 1994, pp. 197-201