Authors: OELKRUG D HAIBER J LEGE R STAUCH H EGELHAAF HJ

Citation: D. Oelkrug et al., TEMPORAL STABILITY OF VAPOR-DEPOSITED MOLECULAR FILMS AS STUDIED BY LASER-LIGHT SCATTERING, Thin solid films, 285, 1996, pp. 581-584

Authors: STAUCH H SIMON K SCHEUNEMANN HU HUBER HL

Citation: H. Stauch et al., IMPACT OF CHUCK FLATNESS ON WAFER DISTORTION AND STEPPER OVERLAY - COMPARISON OF EXPERIMENTAL AND FEM-RESULTS, Microelectronic engineering, 23(1-4), 1994, pp. 197-201