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OBSERVATION OF A DELOCALIZED E' CENTER IN BURIED SIO2
Authors:
VANHEUSDEN K STESMANS A
Citation:
K. Vanheusden et A. Stesmans, OBSERVATION OF A DELOCALIZED E' CENTER IN BURIED SIO2, Applied physics letters, 62(19), 1993, pp. 2405-2407
DEFECT GENERATION SENSITIVITY DEPTH PROFILE IN BURIED SIO2 USING AR PLASMA EXPOSURE
Authors:
STESMANS A VANHEUSDEN K
Citation:
A. Stesmans et K. Vanheusden, DEFECT GENERATION SENSITIVITY DEPTH PROFILE IN BURIED SIO2 USING AR PLASMA EXPOSURE, Applied physics letters, 62(18), 1993, pp. 2277-2279
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