Authors:
KROMER O
FROMHEIN O
GEMMEKE H
KUHNER T
MOHR J
STROHRMANN M
Citation: O. Kromer et al., HIGH-PRECISION READOUT CIRCUIT FOR LIGA ACCELERATION SENSORS, Sensors and actuators. A, Physical, 46(1-3), 1995, pp. 196-200
Citation: M. Strohrmann et al., ACCELERATION SENSOR WITH INTEGRATED COMPENSATION OF TEMPERATURE EFFECTS FABRICATED BY THE LIGA PROCESS, Sensors and actuators. A, Physical, 42(1-3), 1994, pp. 426-429