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Results: 2
A NEW SILICON GAS-FLOW SENSOR-BASED ON LIFT FORCE
Authors:
SVEDIN N KALVESTEN E STEMME E STEMME G
Citation:
N. Svedin et al., A NEW SILICON GAS-FLOW SENSOR-BASED ON LIFT FORCE, Journal of microelectromechanical systems, 7(3), 1998, pp. 303-308
A LIFT-FORCE FLOW SENSOR DESIGNED FOR ACCELERATION INSENSITIVITY
Authors:
SVEDIN N KALVESTEN E STEMME E STEMME G
Citation:
N. Svedin et al., A LIFT-FORCE FLOW SENSOR DESIGNED FOR ACCELERATION INSENSITIVITY, Sensors and actuators. A, Physical, 68(1-3), 1998, pp. 263-268
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