Authors: SVILAN V RODBELL KP CLEVENGER LA CABRAL C ROY RA LAVOIE C JORDANSWEET J HARPER JME

Citation: V. Svilan et al., CRYSTALLOGRAPHIC TEXTURE OF C54 TITANIUM DISILICIDE AS A FUNCTION OF DEEP-SUBMICRON STRUCTURE GEOMETRY, Journal of electronic materials, 26(9), 1997, pp. 1090-1095